English Abstract

Future Angle of Grazing-Incidence Small Angle X-ray Scattering

Katsuhiro YAMAMOTO
Department of Life Science and Applied Chemistry Graduate School of Engineering, Nagoya Institute of Technology, Nagoya, Japan
Nippon Gomu Kyokaishi,(2019),92(2),63-68 General Review in Japanese

The nanoscopic morphology of soft material thin films such as plastic, elastomer and rubber films has been successfully analyzed by grazing-incidence small-angle X-ray scattering (GISAXS). Recently, advanced GISAXS techniques for analysis for surface-, volume-, and material (element)-sensitive method has been reported. Resonant (anomalous) GISAXS and GISAXS with low X-ray photon energy (tender X-rays and soft X-rays near K-edge of carbon) allows probing a complex nanomorphology with those sensitivity. In this report, principle of GISAXS will be outlined simply and advanced GI-SAXS methods will be picked up to open for discussion on new possibility of structure analysis.

Keywords: Grazing-Incidence Small Angle X-ray Scattering, Tender X-ray, Soft X-rays, Resonant Scattering, Thin Films, Block Copolymer, Position and Material Sensitive Measurements