Surface/interface plays an important role for adhesive, laminates, composites, and so on. In this study, surface deformation of rubber was compared with bulk deformation using a scanning electron microscope and an atomic force microscope. The silica reinforced rubber showed inhomogeneous surface deformation, however, the deformation of oriented poly (ethylene terephthalate) filament was found to obey affine deformation. In addition, change of O₂ plasma modified surface properties of elastomer under tensile deformation was evaluated using a contact angle, X-ray photoelectron spectroscopy. The contact angle of the elastomer increased under stretching, which is brought by the decrease of functional groups density on the elastomer surface. On the contrary, when the elastomer was plasma treated under deformation followed by recovery, the high water wettability was kept even after stretching. This PsPR (Pre-stretch followed by Plasma treatment in situ under stretching, then allowed to Recover) process was proposed as a new surface treatment method of rubber. Finally, X-ray computed tomographic image around interphase was shown to investigate adhesion mechanism. Through these studies, relationship between rubber deformation and surface/interface was investigated.